Characterization of a HPHT Boron Ion-Implanted Diamond X-ray Mirror Following High Vacuum Annealing

The incorporation of boron into a diamond lattice holds the potential to advance X-ray optics, offering the capability to manipulate various parameters of the lattice. This includes enhancing near -infrared absorption relative to pure diamond, thereby enabling Q-switchable optics. The use of MeV boron implantation emerges as a promising method for precisely doping the diamond lattice. However, for these optics to function effectively as Bragg -reflecting mirrors, ion implantation must be executed with meticulous attention to maintaining a strainfree, perfect diamond lattice. This study aimed to investigate the feasibility of utilizing a 9 MeV ion beam for high energy boron implantation. Different areas of a high-pressure, high -temperature (HPHT) diamond sample were subjected to irradiation with 9 MeV Boron ions, ranging in fluences from 5 x 10 15 to 2 .5 x 10 16 ions /cm 2 . Following boron implantation, high -temperature vacuum annealing was performed to restore the diamond lattice. Our assessment utilized X-ray rocking curve imaging, surface profilometry, and micro -Raman spectroscopy, with additional observations on near -infrared transmission properties. Our measurement of high -quality Bragg reflection through X-ray rocking curve imaging, sensitive to implantation -induced strain and defects, served as an key diagnostic for the effectiveness of this ion -implanted sample as a Bragg -reflecting optic.