Enhanced Photoresponse Beyond the Bandgap Spectral Limit of a Normal-Incidence Silicon Photodetector by Helium-Ion Implantation
2024 Conference on Lasers and Electro-Optics (CLEO)(2024)
摘要
We enhance the photoresponse beyond the bandgap spectral limit of a normal-incidence silicon photodetector by helium-ion implantation. The minimal detectable optical power is improved from −33.2 dBm to −63.1 dBm at 1550-nm wavelength.
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关键词
Band Gap,Helium Ion Implantation,Optical Absorption,Optical Power,N-methyl-2-pyrrolidone,Detection Power,Minimum Power,Interband Transitions,Transimpedance Amplifier,Helium Ion
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